Product model: AME-PECVD-R
Basic introduction:
This product is a PECVD-R rotary plasma enhanced CVD equipment. PECVD-RRotating plasma enhanced CVD equipment is very suitable for continuous coating and modification of powder materials by CVD method in an atmosphere protected environment.
Details description:
Rotating PECVD:This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there is a mixing baffle. It can repeatedly mix powder or particles with the rotation of the furnace tube. The working tube can be rotated 360° uninterruptedly through mechanical transmission control, so that the materials in the tube can be stirred and mixed to obtain a uniform heating effect; the equipment is also equipped with a plasma generator, which is connected to the furnace tube by inductive coupling, and the generated plasma can cover the furnace tube effectively. Increase the activation energy of the reactants, reduce the reaction temperature, and improve the reaction efficiency. The equipment is equipped with a three-way mass flow meter and a gas mixing device, which can be used to pass a variety of gases into the pipe. At the same time, the equipment is equipped with a high-performance mechanical pump that can quickly evacuate the furnace pipe to vacuum; Kind of CVD process. The rotating device is very suitable for continuous coating and modification of powder materials by CVD method in an atmosphere protected environment.
Technical parameter:
Double temperature zone tube furnace |
Product number |
AME-O1200-60IIC-R |
equipment power |
3KW |
|
Furnace tube material |
High purity quartz |
|
Furnace tube size |
Φ60*420+Φ100*360+Φ60*420mm (quartz shaped tube) |
|
Furnace length |
440mm |
|
Heating zone length |
200mm+200mm |
|
Operating temperature |
0~1150℃ |
|
Limit temperature |
1200°C |
|
Temperature control accuracy |
±1℃ |
|
Thermocouple type |
K-type thermocouple |
|
Temperature control mode |
30-segment program temperature control, PID parameter self-tuning |
|
Display mode |
HD full-color LCD touch screen |
|
Sealing method |
304 stainless steel vacuum flange |
|
Power supply |
AC: 220V 50/60Hz |
|
spinning speed |
0~13rpm |
|
slope |
0~35° |
|
3-way mass flow meter |
Product number |
AME-3Z |
Flowmeter type |
Mass flowmeter |
|
Number of gas paths |
3 way |
|
Measuring range |
A way: 0~100sccm; B way: 0~200 sccm; C way: 0~500 sccm |
|
measurement accuracy |
±1.5% |
|
Working pressure difference |
0.1~0.5MPa |
|
Pipeline interface |
1/4 inch compression fitting |
|
powered by |
AC220V 50/60Hz |
|
Vacuum system |
Vacuum pump |
Bipolar rotary vane pump |
Pumping speed |
1.1L/s |
|
Suction port |
KF16 |
|
Pump ultimate vacuum |
10E-1Pa |
|
powered by |
AC220V 50/60Hz |
|
RF power supply |
Signal frequency |
13.56MHz±0.005% |
Power output range |
0~500W |
|
*Large reflected power |
100W |
|
RF output interface |
50Ω, N-Type, female |
|
Power stability |
≤5W |