Thermal Evaporator
Components of the equipment:
ANGO450 Base System (Advanced PC/PLC Automation) System Frame and Enclosure
• Built on a powder-coated solid welded steel enclosure with a compact footprint
•Access to the cabinet is provided through removable and swing-out panels Vacuum Chamber
•400mmW×400mmD×470mm H: SUS304 high vacuum box chamber
• Glass bead blast finish on chamber surfaces
• Hinged chamber front door for easy internal access
• Large viewport offset to reduce material deposition
•One set removable stainless steel debris shields Safety and Certifications
• Field evaluated to meet CSA SPE-1000 certification
• A detailed safety, alert and interlock system helps protect users as well as the equipment
• The interlock system is a complete set of hardware interlocks managed with a separate safety circuit on a safety rated relay as well as a set of software interlocks
• A 3-light beacon provides a visual indicator of system status System Control with Aeres
• PC control station with Windows 10 Professional running on an industrial PLC
• Angstrom Aires software for unified machine And deposition control built on .NET framework
• Aeres provides you with complete control over each element of your deposition process
• A single complete recipe that controls pressure, gas flows deposition source control and fixturing.
• Aeres complete process integration improves process consistency from run to run and from user to user
• Aeres will accelerate your process development through tight process control and consistency and ensure that an established process is well controlled
• With Aeres you will be able to load your parts and materials and let the machine run the process
• The system provides an auto-sequence mode and manual mode
• Includes a robust user account system with various security and access levels
• Remote connectivity available on all Aeres systems for training and diagnostic support
• Efficient power management
Upgrade for Glovebox Integration
• Adds sliding door for direct mounting to a glovebox
• Hinged rear access door allows chamber access from the room side
Pator HPV-1300Z hybrid bearing turbopump Inlet Flange:
ISO 200 / CF 200Pumping
Speed L/S (N):1,200
Compression Ratio (N):> 10/9
Compression Ratio (H):1 x10/3
Ultimate Pressure(mbar):2.5x10-5Pa(2.0x10-7Torr)
Startup Time(min):6
Rotational Speed (rpm):24,000
Orientation: Any Backing
Pressure (mbar):1.5
Outlet Flange:KF40
Weight (lb):64
Controller Input Voltage:220V
Pator TRP-36 Rotary Vane 10 cfm Vacuum Pump
1.Excellent ultimate vacuum and pumping speed.
2.Low noise and vibration.
3.Displacement Speed: 540L/min 50Hz 640L/min 60Hz
4.Without gas ballast Patial pressure: 4×10-4Mbar
5.Inlet Port: 25/40KF
Water Cooled Resistive Thermal Evaporator: Useful for removing excessive heat during very
high temperature and long duration depositions Priced per feedthrough (2 are required per source)
Point Source Evaporator Deposition Sources (2 metal sources + 2 organic sources ) for
Organic and metal deposition Materials LED-03 or 04 Evaporator Deposition Sources
• Temperature PID Controller with control to ±0.1°C
• 3cc crucible witha 1cc charge capacity
• High purity alumina crucible included, liners sold separately
• Temperature range0-600°C• Control source via temperature or deposition rate
Power supply thermal evaporation Phase-angle fired,
SCR controller with soft-start 0–100% adjustable voltage/power output Over-current trip response within 10 ms of event Near 1 second ramp-up of SCR control signal reduce scold start surge Local and remote setpoint control Bar graph display on front panel shows level of control signal to SCR Optional RS-232 interface for remote PID control
Output Power: 2Kw
Input Voltage: 120 VAC / 240 V AC
Input Current: Up to 20 amps
Output Current: Up to 20 amps
LTE Series Power supply Type-K thermocouple input connectors
standard (others available)Digital temperature and set point Phase-angle fired SCR output Integrated current transducer RS-232 interface for remote PID control
Output Power:200W
Input Voltage:120/240 V
AC Output Voltage:12 V
Input Current:2 amps @ 120 VAC/1 amp @ 240 VAC
Thin Film Deposition SQM-160 Thin Film Deposition Monitor Thickness and rate: ± 0.37 Å
Power:100-120/200-240 VAC, 50/60 Hz, 20 W
The sensor is mounted to a rigid bracket to prevent loss of calibration if accidentally moved The sensor is water-cooled to improve reading accuracy
Masking Capable Substrate Stage Assembly
• Precision dowel pins for substrate transfer and mask alignment
• Suitable for 120mm x 120mm or Ø120mm or smaller pieces
• Custom sample holders available upon request
• Source to substrate distance varies with configuration
• 0-25 RPM continuous rotation capability
Split 2-Piece Substrate Shutter
• Automatic process controlled pneumatic shutters
• Uses high quality magnetic fluid rotary feedthroughs